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Ultra-Low-Profile Precision Rotation Stage Thanks to PILine® Technology – Now Also Available as a Vacuum Version!

Published 26 March 2012 | By Physik Instrumente (PI)

With just 15 mm construction height, the M-660 rotation stage from Physik Instrumente (PI) is one of the slimmest micro translation stages on the market.

The rotation stage provides over 34 µrad position resolution and reaches a velocity of 720 °/s. A version with a higher resolution of 4 µrad offers additional possibilities for the application, for example, in accurate inspection tasks. The stage has a free aperture with 35 mm Ø. Compact combinations with linear stages are possible.

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Versions for use in vacuum up to 10-6 hPa are now available as well. The unique PILine® piezomotor technology developed by PI ensures the compact construction height as well as the high velocity of up to 2 rotations per second. The integrated U-164 PILine® linear motors offer a maximum torque of up to 0.3 Nm regardless of the direction of motion, the stage is designed for a maximum load of 1 kg. The PILine® motors transmit the force directly onto the runner at the moving platform and thus keep the position stable, even when powered down.

Well-known for the high quality of their products, PI is one of the leading players in the global market for precision positioning technology. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. With four German factories and ten subsidiaries and sales offices abroad, the PI group is represented internationally.